满足工业控制的集成MEMS传感器

MEMS (Micro Electro Mechanical System) sensor technology is well established, and has brought benefits to a wide range of applications. MEMS accelerometers revolutionised the automotive-airbag-system industry 15 years ago. Since then they have enabled unique features and applications ranging from hard-disk protection on laptops to game controllers. More recently, the same sensor-core technology has become available in fully integrated, full-featured devices suitable for industrial applications (Figure 1). This has provided an attractive alternative to uncalibrated sensor cores, or high-priced options originally optimised for defence applications. For detecting motion such as vibration, shock, angular rotation, linear motion, and tilt, MEMS accelerometers and gyros provide lower power, compact and robust sensing. Multiple sensors are often combined to provide multi-axis sensing and more accurate data.