扩散硅压力传感器及变送器参数测试系统

扩散硅压力传感器及变送器参数测试系统:　采用具有自校验和信号调理功能的24 位ADC ,开发设计了一种高精度数据采集系统. 该系统能对扩散硅压阻传感器和变送器的特性参数进行高精度的检测;同时,亦可对热电偶等具有毫伏信号输出的传感器进行检测和标定. 作者阐述了该测试系统的原理和构成,介绍了软硬件设计.
关键词: 　测试系统; 扩散硅压阻传感器; 压力变送器; 高精度检测

(1. Dept of Elct Engr ,Xi’an Inst of Tech ,Xi’an 710032 ,China ;2. Xi’an Dongfang Mech Group Company) Abstract : 　A high precision data collection system is designed by using 24 bits ADC which has the function of self - calibration and signal processing. An accurate test for diffuse silicon piezor esistance sensors on pressure transmitters and the transducers like thermocouples , with mV signals outputin can performed with the system. The working principles ,system structure and software design are introduced in this paper.
Key Words : 　test system;diffuse silicon piezoresistance sensor ;pressure transmitter ;high precision test