资料介绍
General
Each laser measurement system’s measurement axis must have an
interferometer and a reflector. Machine design considerations
determine which type of interferometer is best. The choice of the
interferometer for each axis usually determines the reflector for that
axis.
This chapter describes the Agilent Technologies measurement optics
available for Agilent Technologies laser measurement systems. The
first part of this chapter presents material that should be useful to the
user of any of the interferometers. Following this introductory
material, the chapter is divided into subchapters that describe
individual interferometer types, including characteristics and
specifications.
Each laser measurement system’s measurement axis must have an
interferometer and a reflector. Machine design considerations
determine which type of interferometer is best. The choice of the
interferometer for each axis usually determines the reflector for that
axis.
This chapter describes the Agilent Technologies measurement optics
available for Agilent Technologies laser measurement systems. The
first part of this chapter presents material that should be useful to the
user of any of the interferometers. Following this introductory
material, the chapter is divided into subchapters that describe
individual interferometer types, including characteristics and
specifications.
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