PSD在双层主动隔振系统中的应用

简要介绍了位置敏感传感器（position sensitive detector，简称PSD）的基本原理和特点。以PSD 作为检测部件，基于机械振动理论、控制理论和光电位移检测技术，提出了一种双层主动隔振系统，建立了系统数学模型并给出了仿真结果。研究表明，PSD 的引入有效避免了传统加速度传感器所带来的积分问题，提高了系统实时性，从而大大提高了隔振率。
关键词双层主动隔振系统位置敏感传感器
Abstract The basic principle and characteristics of position sensing detector（PSD）are described. A two-layer active vibration isolation system on the
basis of mechanical vibration theory，control theory and photoelectric displacement detection technique is presented in the article. In this system PSD is
adopted as the detective component. System mathematical model is established and simulation result is given. Study suggests that the introduction of PSD
effectively avoids integration problem brought by traditional accelerometer，greatly improves the real time capability thus highly enhances the efficiency of
vibration isolation.
Key words Two-layer active vibration isolation system Position Sensing detector（PSD）