溶胶-凝胶法制备氧化锌薄膜

采用了溶胶-凝胶工艺在普通的玻璃载玻片上成功地制备出具有c轴择优取向性、高的可见光透光率、平整均匀的氧化锌薄膜。通过XRD、AFM以及UV光谱仪等分析，其结果表明：所制备的氧化锌薄膜具有纤锌矿型结构，表面均匀致密，薄膜晶粒尺寸大约在40～90nm，溶胶浓度增大时，其晶粒大小呈增大的趋势。随着涂膜层数的增加，薄膜的(002)方向的取向度增加。薄膜在可见光区的光透过率>85%，在近紫外光波段透射率急剧减小，对应的禁带宽度为3.34 eV。
关 键 词 溶胶-凝胶法; ZnO薄膜; c轴择优取向性; 禁带宽度

Abstract The ZnO thin films were prepared on glass sheets by sol-gel technology, which were characterized by X-ray diffraction, atomic force microscopy and ultra-violet spectrum. The results indicate that the thin films were c-orientation, highly visible transmittance, homogeneous surface and dense with the crystalline structure of hexagonal wurtizite, the crystalline dimension of 40∼90nm. The crystal size increases with the increasing sol concentration, and the films are highly oriented in (002) direction as the growing of the film layers. The transmittance has a sharp fundamental absorption edge in UV region, the optical band gap is evaluate to be around 3.37 eV.
Key words sol-gel; ZnO thin films; c-axis orientation; band gap