Testing of a MEMS-based IC Pro

Introduction
The Nano Indenter G200 is a versatile
instrument capable of measurements
beyond the scope of traditional or even
advanced depth-sensing indentation
tests. NanoSuite Explorer software’s
user-friendly environment for developing
novel test methods turns the Nano
Indenter G200 into a multi-functional
tool capable of several different
types of small-scale mechanical
tests. Each NanoSuite method is a
customizable prescription for driving the
instrument hardware and for collecting,
conditioning, and analyzing the resulting
measurement data.
This application note describes the
development of a novel method for
testing an element in a micro-electro-
mechanical system (MEMS) device. The
MEMS device that is the subject of this
testing is itself used to test integrated
circuits (IC).