基于RBF网络的半导体扩散炉温度控制建模研究

针对半导体扩散炉温度控制问题，提出采用RBF 神经网络控制方法。RBF 神经网络采用3-8-3 结构。建模表明，此RBF 网络数学模型具有良好的控制品质。
关键词：半导体扩散炉；RBF 神经网络；PID 温度控制

Study on Semiconductor Diffuse Furnace Temperature Control Mondeling Based on RBF NN
CAI Bing1,2, HU Rong-yu1, Wang Pei-yuan1, LIU Chuan-qing1 (1.Department of Physics & Electronic Information Technology, XiangFan University , HuBei
XiangFan 441053, China; 2.Department of Control Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China) Abstract: According to the problem of temperature control of semiconductor diffuse furnace, an new control approach is described in the paper, such as RBF NN. the RBF NN construct is
3-8-3,simulation results show that control method has high quality.
Keywords: Semiconductor Diffuse Kiln; RBF NN; PIDTemperature Control