微电子机械系统技术及其应用

微电子机械系统技术的特点是可使制品微型化、集成化并以硅作为加工材料。该技术可分为体微机械加工、表面微机械加工、金属微机械加工和复合微机械加工四类。所采用的基础技术主要有：腐蚀技术、硅键合技术、多层无应力薄膜沉积技术、牺牲层技术、LIGA 技术以及以上技术的复合，该项技术应用广泛。本文重点介绍在微传感器、
微电机、机械滤波器和谐振滤波器等方面的应用，并探讨了发展方向。
关键词:微电子机械系统；微机械加工技术；MEMS 应用

Abstract: Microelectromechanical system (MEMS) technology makes it possible the moralization and integration of the products based on the material of silicon. This technology is divided into four categories: body, surface, metal and compound micromechanical processes. The basic technologies included in the micromechanical system are erosion, si-bond, multiplayer film sediment without stress, sacrifice layer, LIGA and the combined technologies based on them. The applications of
micro-sensors, micro-machines, mechanism filter and resonant filters are presented, and the further development of technology
is discussed.
Key words: micromechanical system; micro-machining; application of MEMS