广义位移传感器在形状误差和误差运动分离中的读数贡献

详细推导并统一了形状误差和误差运动高精度检测2分离技术中各类传感器的读数方程,包括传统的差动变压器式位移传感器、电涡流式位移传感器、电容式微位移传感器和近年来出现的激光微位移传感器、激光角位移传感器以及后两者组合成的组合式广义位移传感器。以统一的列表方式阐明了各传感器的读数贡献。其优点是:根据选用的误差分离方法和与之适配的传感器,便可按列表方式快速、方便地排出用于直线、圆、圆柱度和平面度等误差分离的原始读数方程,并对误差分离的可行性作出了初步分析。
关键词: 激光位移传感器; 形状误差; 误差运动; 误差分离技术
Abstract : In the process of high2precision measurement and separation of form error and error motions , the readings are different with the variance of sensor types. Reading equations of different sorts of sensors are derived elaborately and united to2 gether , including not only ordinary inductance2type displacement sensor , electric2eddy2type displacement sensor , capacitance2 type micro displacement sensor , but also up2to2date laser micro displacement sensor , laser angular displacement sensor and com2 bined2type generalized displacement sensor consisting of the above two. Moreover , the reading contributions of these sensors are
expounded by means of uniform listing. This will bring about obvious merits , that is , according to the selected error separation methods and corresponding sensors , original reading equations for different methods such as straightness , roundness , cylindricity and flatness error separations can be obtained conveniently and rapidly on the basis of these lists , so the feasibility of error sepa2 rations can be analyzed primarily.
Key words : laser displacement sensors ; form error ; error motion ; error separation techniques ( EST)