基于光对准的多传感器轴装配误差补偿技术

含有多传感器的微机电系统在组装传感器时, 一般存在着轴对准问题, 轴的非对准误差能导致很大的系统测量误差。为此提出一种基于光对准的误差补偿方法, 可以在不需要高精度轴对准的前提下, 对装配后的组件进行后续误差检测和实时补偿, 有效地消除装配误差对测量精度的影响。将该方法实施于微机电方位水平仪, 用以测量姿态, 通过仿真结果证实了方法的有效性。关键词: 微机电系统; 多传感器; 轴装配误差; 光对准; 误
差补偿
Abstract: A xis2m isalignment p roblem s occur when mult ip le senso rs are assembled into a m icro2elect ro2mechanical system. The axes m isalignment inevitably induces large measurement erro rs. The p roblem is so lved using an erro r compensation method based on
op t ical alignment. The method does no t require imp roved assembly accuracy, but uses erro r po st2surveying and on2line compensation to elim inate assembly erro rs. Result s of simulations conducted w ith a m icro2elect ro2mechanical azimuth2level detecto r p rove the validity of the method.
Key words: m icro2electro2mechanical system; multi2senso r; axis2m isalignment erro r; op tical alignment; erro r compensation