一种高精度微量气体泄漏检测仪的设计与研究

密封器件气密性检测是一项重要的安全检测之一, 这里采用微差压原理, 利用高精度差压传感器、精密对称气路和单片机测控系统组成测试装置, 实现了对一定容积和压力下密封器件气密性的高精度检测。介绍了该检测仪的工作原理、硬件软件结构和系统性能。
关键词　微差压原理　高精度　传感器　气体泄漏检测仪
Abstract　A irp roof component airt igh t detect ion is one of impo rtant safety detect ions. In th is paper, the device is int roduced,wh ich compo sed of h igh2p recision m icro different ial p ressure senso r, rigid symmet ry air p ipe loop and m icroch ip system by using m icro different ial p ressure p rincip le, realizing airp roof component’s h igh2p recision airp roof detect ion under certain p ressure and cubage. The p rincip le, the hardware and software const ruct ion and it s perfo rmance are discussed.
Key words　M icro different ial p ressure p rincip le　H igh p recision　Senso r　A ir2leakage detecto r