基于PSD的微轮廓测量仪及其控制系统研究

涉及到一种基于PSD 原理的高精度三维轮廓测量仪。X—Y 工作台采用了宏驱动与微驱动相结合的工作方式。宏工作台采用步进电机驱动, 进给精度达1 微米; 微工作台采用精密压电陶瓷驱动, 进给精度最小可达1 纳米。这样, 使得X—Y 测量步距达到1 纳米的条件下, 测量物件的尺寸范围可以扩大为20mm ×20mm , 不仅适合微小构件的精密测量, 而且适合较大器件的精密测量, 且X—Y 方向的位移测量精度最小可达1 纳米。Z 方向位移传感器采用激光单点位置探测器PSD, Z 轴方向的位移测量精度达10 纳米。对微轮廓测量仪的控制系统作了程序设计, 得到了较满意的效果。
关键词　微轮廓测量仪　位置敏感检测器　激光单点阵扫描　控制系统　精密测量
Abstract　Based on PSD p rincip le a h igh p recision 3D p rofiler is p resented. X Y tables adop t combining macro driving w ith m icro driving. The macro table uses step mo to r, the reso lut ion of step is a m icron and the m icro table is driven by p iezoelect ricity ceram ics, it s reso lut ion of step is 1 nm. So under the condit ion of 1 nm of dis2 p lacement, the measurement of object can enlarge to 20mm X 20mm, it is no t only fit fo r p recision measurement of m icro component, but also fit fo r p recision measurement of relat ive bigger component, the reso lut ion of dis2 p lacement of X Y axis is 1 nm. The disp lacement senso r of Z axis adop t s single po int laser po sit ion detecto r PSD, and it s reso lut ion is about 10nm. The p rocedure of who le cont ro l system is p rogrammed w ith V isual Ba2 sic610, and get a bet ter result.
Key words　M icro p rofilometer　PSD　Single laser lat t ice scan　Cont ro l system　P recision measurement