温教授的热岛itedResonan吨实货iconM微结构压力

针对一种以方形硅膜片为一次敏感元件、硅梁谐振子为二次敏感元件; 采用电阻热激励、
压敏电阻拾振的压力微传感器, 分析了其工作机理; 依幅值、相位条件讨论了该谐振式微传感器的闭环自激系统; 建立了微传感器的温度场模型和热应力模型, 并进行了仿真计算与分析。
关键词: 热激励; 谐振式传感器; 压力传感器; 硅微结构

Abstract: 　A cco rding to the sensing st ructure of a p ract ical silicon resonant p ressure m icro sen2 so r w ho se p relim inary sensing unit is a square silicon diaph ragm and the final sensing unit is a sili2 con beam resonato r, its operat ing mechanism is analyzed. The thermal resisto r acts as the excited unit, and the p iezo resist ive unit acts as the detecto r, fo r the abovem icro senso r. By using the am2 p litude and phase condit ions, the self2excit ing clo sed loop system is invest igated based on the oper2 at ing mechanism fo r the abovem icro senso r. The temperature p rofilemodel and the thermal st ress model are established fo r the beam resonato r of the m icro senso r. Mo reover, the thermal featureis simulated and analyzed fo r the above m icro senso r.
Key words: 　thermal excitat ion; resonant senso r; silicon m icro st ructure; p ressure senso r