微型反射式共焦光纤传感器研究

基于光学系统信息传输不变性原理, 讨论了微型反射式共焦光纤传感器的高分辨率性质。该传感器的光纤末端头起到了共焦扫描光学显微镜的点光源和点探测器的功能, 从而使视场减小, 信噪比提高, 抗干扰性增强。它独特的高轴向分辨率特性, 可用于微观形貌、外形尺寸和曲面轮廓等方面的高精度检测, 同时为狭小空间内尺度测量等大量极限测量和不可测问题提供了解决思路。
关键词: 共焦显微成像; 光纤传感器; 自聚焦透镜; 光学信息
Abstract: Based on the concep t of the info rmat ion invariance of an op t ical system , the p roperty of the h igh reso lut ion of the reflect ive confocal op t ical senso r is discussed. The characterist ic of po int ligh t source and po int detecto r of confocal scanning op t icalm icro scopy caused by the end of th is senso rmakes the view field smaller, increases signal to no ise rat io, imp roves the ant i2interference ability. Because of the special characterist ic of h igh axis reso lut ion, the senso r can be used in the p recise measurement of surface p rofile, shape dimension and curve contour,w h ich p rovides a suggest ion fo r a great deal of di2 mensionalmeasurement in small space.
Key words: Confocalm icro scopy; F iber2op t ic senso r; Graded index (GR IN ) lens; Op t ical info rmat ion