基于压电驱动的纳米级精密定位系统的研究

利用压电陶瓷致动器作为驱动元件设计了X 2Y 两自由度精密定位工作台, 并利用有限元分析法对机构进行了优化设计, 采用电阻应变片作为微位移检测传感器, 在此基础上设计了闭环控制器, 该控制器包括压电陶瓷驱动单元、微位移传感器检测单元和中央处理单元, 最后利用P ID 控制法进行了闭环控制实验研究。实验结果表明, 本系统具有较好的控制品质和优异的动态性能, 在对10 Lm ×10 Lm 两自由度工作台的控制中, 闭环控制精度
达10 nm , 阶跃响应的稳定时间小于8 m s。
关键词: 压电陶瓷致动器; 精密定位; 闭环控制
Abstract: Based on p iezo actuato r, a p recision X 2Y stage has been designed by using the finite elements method. A clo sed2loop cont ro ller,w h ich used st rain gauge as m icro2disp lacement senso r has also been considered. The cont ro ller includes drive2unit, co llect ion unit deals w ith m icro2disp lacement senso r, and co re p rocess unit. Ex2 perimentat ion has been carried out using P ID cont ro lmethod. The result show s that the system has good cont ro l quality and dynam ic response. The po sit ion accuracy ach ieves 10 nm w h ile w e cont ro l the X 2Y stage w ith 10 Lm× 10 Lm t ravel range. To a step response, system reaches stabilizat ion w ith in 8 m s.
Key words: p iezo actuato r; p recision po sit ioning; clo sed2loop cont ro l