先行分离直行运动误差的二次相移三点法

现代检测与补偿技术越来越要求测量的高精度和实时性, 通过直接获取运动误差以避免
误差残留的二次相移三点法, 为运动误差的在线高精度检测提供了一条有效途径. 通过对3 个传感器的测量数据按照二次相移原则进行数据重组, 在数据处理的首次操作时消除直线形状误差的影响, 从而在反滤波基础上可以先行分离出直行运动误差的平移分量和转动分量. 利用权函数对比分析, 证明了二次相移三点法与先行分离形状误差的直线频域三点法在本质上的同源性和统一性. 实验结果表明, 该方法可以较好地分离出直行运动误差和直线形状误差.
关键词: 二次相移三点法; 误差分离技术; 映射矩阵; 反滤波; 直行运动误差
Abs tra c t: To imp lem en t h igh2p recision and on2linem easu rem en t of linearmo t ion erro rs, a novel erro r sep2 arat ion techn ique (EST ) m ethod nam ed quadrat ic phase sh if t th ree2po in t m ethod w as p ropo sed, w h ich is based on the data recon st ruct ion and inverse f iltering. A cco rding to the p rincip le of quadrat ic phase sh if t, the data f rom th ree p robes are recon st ructed, and the inf luence of fo rm erro r can be elim inated, so the lin2 ear erro r mo t ion can be separated and gained f irst ly on the basis of inverse f iltering. Comparat ive analysis of the w eigh t ing funct ion p roves the homo logy and un itarity betw een the common f requency th ree2po in t m ethod and the p ropo sed m ethod. Sat isfacto ry effect s w ere ach ieved by som e experim en t s.

Ke y w o rds: quadrat ic phase sh if t th ree2po in t m ethod; erro r separat ion techn iques (EST ) ; m app ing m a2 t rix; inverse f iltering; linear mo t ion erro r