侵彻武器用MEMS大g值加速度计

侵彻武器穿入地面等坚硬物质的加速度可达重力加速度的2 万倍至几十万倍， 要求所用加速度传感器既能抗击该工作环境， 又能识别冲击与钻入的整个过程。美国侵彻武器用MEMS 大g 值加速度计属电容传感器， 其工作原理采用2 个电参数完全相同的电容，1 个作检测电容，1 个作参考电容， 将被测加速度值的变化转换成电容量的变化而实现。该加速度计由结构单元和信号处理电路组成。实验结果表明， 尚需对2 组成部分进一步集成， 对机械静电阻尼进行优化， 对封装深入研究。
关 键 词 ： 大g 值加速度计； 电容传感器； 微机电系统（MEMS）； 侵彻武器
Abstract: The acceleration of penetrator weapon when it irrupts into ground firm substance is twenty thousand times to hundreds thousand of times of gravity acceleration, the acceleration sensor that was required not only oppugns work circumstance but also identifies the process of concussion and irruption. High-g accelerometer in MEMS for USA penetrator weapon pertains to capacitance sensor, its operational principle is that 2 capacitances with same electric parameter are used, one used as test, and another used as reference, and that the change of acceleration value tested is transformed in the change of capacitance quantity. High-g accelerometer consists of structure unit and the signal processing circuit. The tested results show that 2 parts of structure unit and the signal processing circuit should be integrate d and the mechanical static damp is optimized, the encapsulation is researched.
Key Words: High-G Accelerometer; Capacitance sensor; MEMS; Penetrator Weapon