一种内径尺寸光电非接触测量方法

基于光三角测量原理，提出了一种内径尺寸的非接触测量方法。对单光三角测量原理进行了分析，给出了相应的内径尺寸计算公式，并建立了解决单光三角法光探头偏心的数学模型。应用单光三角测量原理，结合半导体激光准直技术、现代传感技术、伺服控制技术和计算机技术研制了一种非接触式内径尺寸测量系统。论述了系统的组成和总体结构，并通过实验对系统的测量精度进行了验证。结果表明：测量系统分辨率可达0.01 mm，测量极限误差不大于0.03 mm，该测量方法是可行的。
关 键 词 内径; 光三角法; 非接触测量; 光电测量系统

Abstract Based on optical triangulation measuring principle, an inner diameter non-contact measuring method is presented in this paper. First, the principle of optical single-triangulation which is used for non-contact measurement of inner diameter is analyzed and described. The corresponding formula for calculating the dimension of inner diameter is presented. The mathematics model for solving eccentricity of optical head which is adopted in the optical single-triangulation method is founded. The paper adopts optical single-triangulation measuring principle to design a system of inner diameter non-contact measurement with the technique of laser collimation, modern sensor, servocontrol, computer, etc. In this paper, the constitution and overall structure of the system are described, and also, the accuracy of system is verified by experiments. the measuring system resolving power can reach 0.01 mm, the limited measuring error not more than 0.03 mm. It indicates that the measuring method is applicable.
Key words inner diameter; optical triangulation; non-contact measurement; optoelectronic measuring system