资料介绍
Introduction
The processing that is required to lower
the dielectric constant in a low-k fi lm
has the adverse effect of degrading the
mechanical properties of the fi lm. Low-k
fi lms are subjected to many processes
that test the strength of these fi lms and
their adhesion to the substrate such
as chemical and mechanical polishing
(CMP) and wire bonding. It is important
for these materials to resist plastic
deformation during these processes
and remain intact without blistering up
from the substrate. Ideally, a dielectric
material will have a high hardness and
elastic modulus because, traditionally,
these two parameters help to defi ne
how the material will react when
subjected to manufacturing processes.
In this application note, scratch
tests are preformed on several low-k
samples using a ramp-load scratch
test. The results from scratch testing
and nanoindentation are examined
through correlation analysis to better
understand the interconnectedness
of scratch results.
The processing that is required to lower
the dielectric constant in a low-k fi lm
has the adverse effect of degrading the
mechanical properties of the fi lm. Low-k
fi lms are subjected to many processes
that test the strength of these fi lms and
their adhesion to the substrate such
as chemical and mechanical polishing
(CMP) and wire bonding. It is important
for these materials to resist plastic
deformation during these processes
and remain intact without blistering up
from the substrate. Ideally, a dielectric
material will have a high hardness and
elastic modulus because, traditionally,
these two parameters help to defi ne
how the material will react when
subjected to manufacturing processes.
In this application note, scratch
tests are preformed on several low-k
samples using a ramp-load scratch
test. The results from scratch testing
and nanoindentation are examined
through correlation analysis to better
understand the interconnectedness
of scratch results.
下载该资料的人也在下载
下载该资料的人还在阅读
更多 >
- 可视化编程语言Scratch学习编码 3次下载
- baseline Testing配置检查工具 0次下载
- Scratch图形化编程软件安装包下载 0次下载
- 如何使用Scratch和ROS进行教育机器人编程的设计与实现 23次下载
- 基于Scratch和ROS的教育机器人编程与实现 10次下载
- Scratch Testing of Multilayere 14次下载
- Scratch Testing of Hard Drive 9次下载
- Tensile Testing of Basalt Fibe 6次下载
- Testing Multiple UUT’s at Once 6次下载
- Testing and Troubleshooting Di 8次下载
- Testing ATM Signalling Perform 13次下载
- Smart FET Robustness Testing 18次下载
- RoHS测试申请表 RoHS Testing Requisi 13次下载
- Testing method of printed wiri 0次下载
- Dynamic Testing Method for Yar 15次下载
- 低代码(Low-Code)是什么?低代码的特点有哪些? 651次阅读
- 什么是阈值、上拉电阻和下拉电阻、负载电流? 574次阅读
- 如何使用IDEA编写项目代码 876次阅读
- DevEco Testing注入攻击测试的背后原理 1243次阅读
- 使用IDEA编写项目代码的实用小技巧 2013次阅读
- 宽禁带器件和仿真环境介绍 1317次阅读
- dfrobot面向STEM的Scratch创新课程简介 1433次阅读
- 在贴片加工厂中有哪些安全防护需要了解 1197次阅读
- 复合放大器实现高精度的高输出驱动能力 获得最佳的性能 1468次阅读
- 用降压型稳压器或线性稳压器电源时值来会为负载供电 872次阅读
- 锂电池并联充电时保护板均衡原理 2.7w次阅读
- 更小更智能的电机控制器推进HEV/EV市场 1023次阅读
- Low Power概念介绍<SRPG Cell> 1.1w次阅读
- 图文详解动力电池安全测试技术及案列分析 6349次阅读
- gpu工作原理介绍 1.3w次阅读
下载排行
本周
- 1电子电路原理第七版PDF电子教材免费下载
- 0.00 MB | 1491次下载 | 免费
- 2单片机典型实例介绍
- 18.19 MB | 95次下载 | 1 积分
- 3S7-200PLC编程实例详细资料
- 1.17 MB | 27次下载 | 1 积分
- 4笔记本电脑主板的元件识别和讲解说明
- 4.28 MB | 18次下载 | 4 积分
- 5开关电源原理及各功能电路详解
- 0.38 MB | 11次下载 | 免费
- 6100W短波放大电路图
- 0.05 MB | 4次下载 | 3 积分
- 7基于单片机和 SG3525的程控开关电源设计
- 0.23 MB | 4次下载 | 免费
- 8基于AT89C2051/4051单片机编程器的实验
- 0.11 MB | 4次下载 | 免费
本月
- 1OrCAD10.5下载OrCAD10.5中文版软件
- 0.00 MB | 234313次下载 | 免费
- 2PADS 9.0 2009最新版 -下载
- 0.00 MB | 66304次下载 | 免费
- 3protel99下载protel99软件下载(中文版)
- 0.00 MB | 51209次下载 | 免费
- 4LabView 8.0 专业版下载 (3CD完整版)
- 0.00 MB | 51043次下载 | 免费
- 5555集成电路应用800例(新编版)
- 0.00 MB | 33562次下载 | 免费
- 6接口电路图大全
- 未知 | 30320次下载 | 免费
- 7Multisim 10下载Multisim 10 中文版
- 0.00 MB | 28588次下载 | 免费
- 8开关电源设计实例指南
- 未知 | 21539次下载 | 免费
总榜
- 1matlab软件下载入口
- 未知 | 935053次下载 | 免费
- 2protel99se软件下载(可英文版转中文版)
- 78.1 MB | 537793次下载 | 免费
- 3MATLAB 7.1 下载 (含软件介绍)
- 未知 | 420026次下载 | 免费
- 4OrCAD10.5下载OrCAD10.5中文版软件
- 0.00 MB | 234313次下载 | 免费
- 5Altium DXP2002下载入口
- 未知 | 233046次下载 | 免费
- 6电路仿真软件multisim 10.0免费下载
- 340992 | 191183次下载 | 免费
- 7十天学会AVR单片机与C语言视频教程 下载
- 158M | 183277次下载 | 免费
- 8proe5.0野火版下载(中文版免费下载)
- 未知 | 138039次下载 | 免费
评论